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Proceedings Paper

Digital holographic Michelson interferometer for nanometrology
Author(s): Alexander A. Sevrygin; V. I. Korotkov; S. A. Pulkin; I. M. Tursunov; D. V. Venediktov; V. Yu. Venediktov; O. V. Volkov
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Paper Abstract

The paper considers the dynamic holographic interferometry schemes with amplification (multiplication) of holographic fringes and with correction for distortions, imposed by the interferometer scheme elements. The use of digital microscope and of the matrix light modulator with direct addressing provides the completely digital closed-loop performance of the overall system for real-time evaluation of nano-scale objects size. Considered schemes were verified in the laboratory experiment, using the Michelson micro-interferometer, equipped by the USB-microscope and digital holography stage, equipped by the Holoeye spatial light modulator.

Paper Details

Date Published: 11 November 2014
PDF: 6 pages
Proc. SPIE 9271, Holography, Diffractive Optics, and Applications VI, 927118 (11 November 2014); doi: 10.1117/12.2071084
Show Author Affiliations
Alexander A. Sevrygin, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
V. I. Korotkov, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
S. A. Pulkin, Saint-Petersburg State Univ. (Russian Federation)
I. M. Tursunov, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
D. V. Venediktov, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
V. Yu. Venediktov, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
St.-Petersburg State Univ. (Russian Federation)
Saint Petersburg National Research Univ. of Information Technologies, Mechanics, and Optics (Russian Federation)
O. V. Volkov, Saint Petersburg National Research Univ. of Information Technologies, Mechanics, and Optics (Russian Federation)


Published in SPIE Proceedings Vol. 9271:
Holography, Diffractive Optics, and Applications VI
Yunlong Sheng; Chongxiu Yu; Changhe Zhou, Editor(s)

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