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Proceedings Paper

A high sensitivity humidity sensor based on micro-ring resonator with three coupling points
Author(s): Shi-liang Guo; Wen-juan Wang; Chun-hai Hu
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Paper Abstract

A novel high sensitivity humidity sensor based on micro-ring resonator with three coupling points (MRRTCP) is reported. Since the dielectric constant of Polyimide is highly sensible to the relative humidity of the environment, we choose the Polyimide (PI) as the moisture material. The effective refractive index of the sensing part of the sensor changes as the relative humidity of the environment changes, this leading to an obvious shift of the output spectrum. The sensing range of the relative humidity sensor is 0~100%RH, and the sensitivity is 0.0017μm/%RH, and the structure is relatively simple and could be used in micro-scale humidity sensing.

Paper Details

Date Published: 3 December 2014
PDF: 5 pages
Proc. SPIE 9297, International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors, 92972P (3 December 2014); doi: 10.1117/12.2071075
Show Author Affiliations
Shi-liang Guo, Yanshan Univ. (China)
Wen-juan Wang, Yanshan Univ. (China)
Chun-hai Hu, Yanshan Univ. (China)


Published in SPIE Proceedings Vol. 9297:
International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors
Jurgen Czarske; Shulian Zhang; David Sampson; Wei Wang; Yanbiao Liao, Editor(s)

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