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Proceedings Paper

Phase retrieval for optical metrology
Author(s): Giancarlo Pedrini; Ahmad Faridian; Alok Kumar Singh; Wolfgang Osten
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Paper Abstract

Phase retrieval methods have useful applications for optical imaging, metrology and 3D reconstruction. One such technique to recover the phase of the object wavefront is digital holography. In this paper we will show applications of digital holographic techniques for the time resolved measurement of deformation of microelectromechanical systems (MEMS) and for determination of residual stresses. Furthermore digital holography can be used for the investigations of microscopic samples and its resolution can be increased by using short wavelength and oblique illumination. We will see as well that dark-field digital holographic microscopy can be used to visualize biological specimens. A phase retrieval methods, which does not use a reference wave is also described in the last part of the paper.

Paper Details

Date Published: 13 November 2014
PDF: 8 pages
Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 927602 (13 November 2014); doi: 10.1117/12.2071038
Show Author Affiliations
Giancarlo Pedrini, Univ. Stuttgart (Germany)
Ahmad Faridian, Univ. Stuttgart (Germany)
Alok Kumar Singh, Univ. Stuttgart (Germany)
Wolfgang Osten, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 9276:
Optical Metrology and Inspection for Industrial Applications III
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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