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Proceedings Paper

Simultaneous phase-shifting interferometry study based on the common-path Fizeau interferometer
Author(s): Feng-wei Liu; Yong-qian Wu
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Paper Abstract

A simultaneous phase-shifting interferometry(SPSI) based on the common-path Fizeau interferometer has been discussed.In this system,two orthogonal polarized beams, using as the reference beam and test beam ,are detached by a particular Wollaston prism at a very small angle,then four equal sub-beams are achieved by a combination of three non-polarizing beam splitters(NPBS),and the phase shifts are introduced by four polarizers whose polarization azimuths are 0°, 45°, 90°, 135° with the horizontal direction respectively,the four phase shift interferograms are collected simultaneously by controlling the CCDs working at the same time .The SPSI principle is studied at first,then is the error analysis, finally we emulate the process of surface recovery by four steps phase shifts algorithm,the results indicate that, to ensure the feasibility of the SPSI system, we have to control the polarization azimuth error of the polarizer in ± 0.5°.

Paper Details

Date Published: 18 September 2014
PDF: 9 pages
Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92821Z (18 September 2014); doi: 10.1117/12.2070972
Show Author Affiliations
Feng-wei Liu, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Yong-qian Wu, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 9282:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Wei Gao, Editor(s)

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