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Proceedings Paper

The height error range of multilayer diffractive optical element with consideration of polychromatic integral diffraction efficiency
Author(s): Long Gao; Changxi Xue; Hongfang Yang; Xin Nie
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Paper Abstract

According to the expression of the phase delay and diffraction efficiency of the diffractive optical elements(DOEs), the expression of diffraction efficiency of multilayer diffractive optical element(MLDOEs) with the height error in fabrication process was described in this paper. We selected the PC and PMMA used usually at optics as substrate material of MLDOEs, and analyze the height error range of multilayer diffractive optical element with consideration of polychromatic integral diffraction efficiency basing on the mathematical analysis model of the relationship between height error and diffraction efficiency for MLDOEs. The range of height error the diffraction efficiency of MLDOEs was given. This model can be used to guide the design and fabrication process of hybrid diffraction refractive optical system for optical engineer.

Paper Details

Date Published: 3 December 2014
PDF: 7 pages
Proc. SPIE 9297, International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors, 92970K (3 December 2014); doi: 10.1117/12.2070818
Show Author Affiliations
Long Gao, Changchun Univ. of Science and Technology (China)
Changxi Xue, Changchun Univ. of Science and Technology (China)
Hongfang Yang, Changchun Univ. of Science and Technology (China)
Xin Nie, Changchun Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 9297:
International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors
Jurgen Czarske; Shulian Zhang; David Sampson; Wei Wang; Yanbiao Liao, Editor(s)

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