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Proceedings Paper

Realization of sub-micron radius of curvature measurement in vertical interferometer workstation
Author(s): Erlong Miao; Rudong Wang; Wei Zhang; Shijun Peng
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Paper Abstract

Radius of curvature (ROC) is one of the key parameters for optical elements and it is especially important for high quality optical system, in which the computer-aided integration is wildly used. ROC is one of the main input parameters and its measurement accuracy is a premise for high quality integration. In this paper, sub-micron ROC measurements are realized in a vertical interference workstation based on Fizeau interferometer. The error sources and uncertainty of the system are analyzed. Experiment results based on samples with difference ROC are presented and in accordance with the analysis. At last, a ROC comparing tests between the system and a three-coordinates measuring machine (CMM) are performed on a SiC ball to certify the workstation’s measurement uncertainty.

Paper Details

Date Published: 18 September 2014
PDF: 7 pages
Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92820M (18 September 2014); doi: 10.1117/12.2070796
Show Author Affiliations
Erlong Miao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Rudong Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Wei Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Shijun Peng, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 9282:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Wei Gao, Editor(s)

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