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Proceedings Paper

Evaluating surface repeatability for interferometric measurement: a comparative study
Author(s): Haiyang Quan; Xi Hou; Fan Wu
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Paper Abstract

The result of an interferometric surface figure measurement is usually a height map, from which single parametric descriptors (for example the RMS) or residual maps are the most commonly used methods for determining the measurement repeatability. An alternate technique based on a standard deviation matrix is used to better describe the variation among successive measurements. A standard deviation matrix is acquired by computing standard deviation of the height map pixel by pixel. Only one standard deviation matrix can provide a spatial description of the repeatability as well as parametric descriptors (for example the mean) of the standard deviation matrix. Comparative study on the evaluation of measurement repeatability between different methods is shown by both simulation and experiment. It seems that the standard deviation matrix method is more valid to detect the variation than other techniques in the measurement of surface figure.

Paper Details

Date Published:
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Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92823E; doi: 10.1117/12.2070623
Show Author Affiliations
Haiyang Quan, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Xi Hou, Institute of Optics and Electronics (China)
Fan Wu, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 9282:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Wei Gao, Editor(s)

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