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Proceedings Paper

Digital calibration method for defects evaluation of large fine optical surfaces
Author(s): Xiaoyu Chen; Dong Liu; Yongying Yang; Lu Yan; Lu Li; Pin Cao; Shitong Wang; Yibing Shen
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Paper Abstract

The digital calibration method, which is employed in the Surface Defects Evaluation System (SDES) for the defects evaluation of large fine optical surfaces, is presented in this paper. A criterion board, which comes from special design and careful fabrication, is employed to relate the dimensions of the defects and those of their images. The calibration procedure, including collecting of calibration images, digital image processing and calibration function fitting, is described in detail in this paper. Calibration experiments on scratch width and dig diameter were carried out at three different microscope magnification conditions. Experiment results show that following the proposed digital calibration method, micron-sized defects distributed sparsely on a large-aperture fine optical surface can be evaluated with micron accuracy and high efficiency.

Paper Details

Date Published: 6 August 2014
PDF: 12 pages
Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92812R (6 August 2014); doi: 10.1117/12.2070598
Show Author Affiliations
Xiaoyu Chen, Zhejiang Univ. (China)
Dong Liu, Zhejiang Univ. (China)
Yongying Yang, Zhejiang Univ. (China)
Lu Yan, Zhejiang Univ. (China)
Lu Li, Zhejiang Univ. (China)
Pin Cao, Zhejiang Univ. (China)
Shitong Wang, Zhejiang Univ. (China)
Yibing Shen, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 9281:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

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