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Proceedings Paper

Double drive modes unimorph deformable mirror for femtosecond laser beam wavefront correction
Author(s): Ying Liu; Junjie Chen; Jianqiang Ma; Baoqing Li; Jiaru Chu
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Paper Abstract

Once a laser beam suffers from wavefront aberrations, the intensity of the focal spot degrades and the shape of the focus spot distorts. The same problem also exists in femtosecond laser fabrication system. The aberrations in the femtosecond laser fabrication system contain two main components: system aberrations and aberrations from the refractive index mismatch problem. Recently, adaptive optics (AO) has been used for laser beam aberrations correction to improve the light beam quality. In this paper, we introduce an adaptive optics system with double drive modes unimorph deformable mirror (DM) into the femtosecond laser fabrication system. In the experiments, the hill-climbing algorithm based on Zernike modes is used to control the DM to correct the aberrations in the close-loop manner. After correction for system aberrations and the refractive index mismatch aberrations, the shape and maximum intensity of the focal laser spot is much improved.

Paper Details

Date Published: 21 August 2014
PDF: 7 pages
Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 928311 (21 August 2014); doi: 10.1117/12.2070595
Show Author Affiliations
Ying Liu, Univ. of Science and Technology of China (China)
Junjie Chen, Univ. of Science and Technology of China (China)
Jianqiang Ma, Ningbo Univ. (China)
Baoqing Li, Univ. of Science and Technology of China (China)
Jiaru Chu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 9283:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Tianchun Ye; A. G. Poleshchuk; Song Hu, Editor(s)

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