Share Email Print
cover

Proceedings Paper

Fused silica fine grinding with low roughness
Author(s): Lei Dai; Yongqiang Gu; Di Wu
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Lithography-optics is one of the most complex optical systems. The fine grinding process is the most important step before polishing. Roughness and sub-surface damage (SSD) are essential outputs of fine grinding. We demonstrate the method that use fix abrasive cup tool with CNC grinding machine to complete the fine grinding process, even instead of lapping process. And experiment sample roughness can reach 23.40nm rms and Ra 18.554nm. The SSD estimate is about 2 μm which is also smaller than commercial lapping process. The fine grinding output can satisfy the lithography optic fabrication demands and efficiently reduce the polishing time.

Paper Details

Date Published: 6 August 2014
PDF: 5 pages
Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92810Y (6 August 2014); doi: 10.1117/12.2070306
Show Author Affiliations
Lei Dai, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Yongqiang Gu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Di Wu, Air Force Aviation Univ. (China)


Published in SPIE Proceedings Vol. 9281:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

© SPIE. Terms of Use
Back to Top