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Proceedings Paper

Electron-beam recording of patterns in chalcogenide films
Author(s): S. A. Sergeev; M. S. Iovu; O. V. Iaseniuc
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Paper Abstract

Thin films of chalcogenide glasses (ChG) of different composition have been used for e-beam recording of diffraction grating structures. The dependencies of diffraction efficiency of gratings on radiation dose were studied. The influence of ChG film composition on diffraction properties of gratings was shown. It was established that the refractive index gratings formed in As2S3 films exhibit high stability during their dark storage. The diffraction efficiency enhancement caused by uniform light irradiation was observed for gratings recorded in As4S3Se3 thin films, doped with Sn. With use of computer-controlled positioning of electron beam both the raster scan and vector patterns were recorded in As2S3 films. In the former case the images from BMP-files were patterned. In the latter case the mosaic of diffraction gratings, producing the multi-beam light diffraction was recorded.

Paper Details

Date Published: 20 February 2015
PDF: 6 pages
Proc. SPIE 9258, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII, 92580S (20 February 2015); doi: 10.1117/12.2069974
Show Author Affiliations
S. A. Sergeev, Institute of Applied Physics (Moldova)
M. S. Iovu, Institute of Applied Physics (Moldova)
O. V. Iaseniuc, Institute of Applied Physics (Moldova)

Published in SPIE Proceedings Vol. 9258:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII
Ionica Cristea; Marian Vladescu; Razvan Tamas, Editor(s)

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