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Proceedings Paper

Measurement of the absolute accuracy (to <0.5%) of a clip-level beam profiler using Fresnel diffraction by a wide slit
Author(s): Thomas F. Johnston; John M. Fleischer
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Paper Abstract

By comparing the measured width of an optical test patten to the known width, the absolute error of a clip-level profiler is determined to be (-0.1 +/- 0.3)%. An expanded fundamental mode beam illuminates a pair of opposed knife edges (a wide slit) to generate the test pattern by Fresnel diffraction. Analysis of the diffraction pattern gives 18.2% as the appropriate clip level to read the geometrical shadow width between edges (with additional small adjustments for illumination non-uniformity and the finite size of the scanning aperture). The separation between the edges is determined by mechanical translation edge to edge through a focused beam. 3

Paper Details

Date Published: 17 April 1995
PDF: 7 pages
Proc. SPIE 2375, Beam Control, Diagnostics, Standards, and Propagation, (17 April 1995); doi: 10.1117/12.206987
Show Author Affiliations
Thomas F. Johnston, Olenellus Engineering (United States)
John M. Fleischer, Photon, Inc. (United States)


Published in SPIE Proceedings Vol. 2375:
Beam Control, Diagnostics, Standards, and Propagation
Lindsay W. Austin; Adolf Giesen; Daniel H. Leslie, Editor(s)

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