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Proceedings Paper

Study on the micro-milling of optical microstructure with the assist of the workpiece vibration
Author(s): Guo Li; Fei Ding; Bo Wang; Lin Che; Chen Feng Zhang
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Paper Abstract

Precision micro-milling technology is an important method to machine microstructure. However, precision micro-milling cutting system has relatively low stiffness. This will directly lead to the deterioration of the machining quality and thus cannot fulfill the high accuracy requirements of parts. Vibration assisted machining has produced a good effect in high stiffness cutting system using non-rotary tool. In this paper, the workpiece vibration assisted method is adopted instead, to improve the processing condition and the practical machining quality.The vibration assisted system is a vibration worktable driven by a piezoelectric ceramic actuator. In order to study the influence of vibration frequency on the machining quality, a non-resonant vibration assisted worktable is designed to realize the adjustment of vibration frequency. Orthogonal experiment is conducted to study the influence of three factors including the feed rate, vibration frequency and amplitude on the machining quality. The ranges of these factors are 1 μm/z to 5 μm/z, 500 Hz to 4000 Hz, and 0.5 μm to 2 μm, respectively. The experimental results show that, in the extent of the process parameters, form error (P-V value) and roughness (Ra) decrease as the vibration frequency increases, while the vibration amplitude contributes to good surface quality only in a proper range. Too low amplitude has little influence on the machining quality, and too high amplitude may even worsen the quality. And after the vibration assisted method is applied, the PV value and Ra can be reduced by approximately 27% and 42%.

Paper Details

Date Published: 21 August 2014
PDF: 6 pages
Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 92830H (21 August 2014); doi: 10.1117/12.2069852
Show Author Affiliations
Guo Li, Harbin Institute of Technology (China)
Fei Ding, Harbin Institute of Technology (China)
Bo Wang, Harbin Institute of Technology (China)
Lin Che, Harbin Institute of Technology (China)
Chen Feng Zhang, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 9283:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Tianchun Ye; A. G. Poleshchuk; Song Hu, Editor(s)

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