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Proceedings Paper

A novel optical method for measuring the thin film stress
Author(s): Yen-Chang Chu; Kun-Huang Chen; Jing-Heng Chen; Hua-Ken Tseng; Yu-Shiang Chang
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Paper Abstract

This paper proposes a thin-film stress measurement system. By applying a constant velocity to the projection grating along the grating plane, a series of sampling points of the sinusoidal wave can be recorded using a CCD camera. The phase distribution of the optimized heterodyne moiré signal can be extracted by the least-squares sine fitting algorithm and then the surface profile of the tested flexible substrate can subsequently be acquired. Using polynomial fitting method to depict the cross-section curve of the substrate, estimating the resultant curvature radii of the uncoated and coated substrates, and substituting these two radii into the corrected Stoney formula, the thin-film stress of the flexible substrate can consequently be obtained. This method features high stability and high resolution due to the introduction of the projection moiré and heterodyne interferometry.

Paper Details

Date Published: 21 August 2014
PDF: 4 pages
Proc. SPIE 9233, International Symposium on Photonics and Optoelectronics 2014, 92331V (21 August 2014); doi: 10.1117/12.2069833
Show Author Affiliations
Yen-Chang Chu, Feng Chia Univ. (Taiwan)
Kun-Huang Chen, Feng Chia Univ. (Taiwan)
Jing-Heng Chen, Feng Chia Univ. (Taiwan)
Hua-Ken Tseng, Feng Chia Univ. (Taiwan)
Yu-Shiang Chang, Feng Chia Univ. (Taiwan)

Published in SPIE Proceedings Vol. 9233:
International Symposium on Photonics and Optoelectronics 2014
Zhiping Zhou, Editor(s)

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