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Proceedings Paper

Research on the magnetorheological finishing (MRF) technology with dual polishing heads
Author(s): Wen Huang; Yunfei Zhang; Jianguo He; Yongcheng Zheng; Qing Luo; Jing Hou; Zhigang Yuan
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Paper Abstract

Magnetorheological finishing (MRF) is a key polishing technique capable of rapidly converging to the required surface figure. Due to the deficiency of general one-polishing-head MRF technology, a dual polishing heads MRF technology was studied and a dual polishing heads MRF machine with 8 axes was developed. The machine has the ability to manufacture large aperture optics with high figure accuracy. The large polishing head is suitable for polishing large aperture optics, controlling large spatial length’s wave structures, correcting low-medium frequency errors with high removal rates. While the small polishing head has more advantages in manufacturing small aperture optics, controlling small spatial wavelength’s wave structures, correcting mid-high frequency and removing nanoscale materials. Material removal characteristic and figure correction ability for each of large and small polishing head was studied. Each of two polishing heads respectively acquired stable and valid polishing removal function and ultra-precision flat sample. After a single polishing iteration using small polishing head, the figure error in 45mm diameter of a 50 mm diameter plano optics was significantly improved from 0.21λ to 0.08λ by PV (RMS 0.053λ to 0.015λ). After three polishing iterations using large polishing head , the figure error in 410mm×410mm of a 430mm×430mm large plano optics was significantly improved from 0.40λ to 0.10λ by PV (RMS 0.068λ to 0.013λ) .This results show that the dual polishing heads MRF machine not only have good material removal stability, but also excellent figure correction capability.

Paper Details

Date Published: 20 August 2014
PDF: 7 pages
Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92811U (20 August 2014); doi: 10.1117/12.2069796
Show Author Affiliations
Wen Huang, Institute of Mechanical Manufacturing Technology (China)
Yunfei Zhang, Institute of Mechanical Manufacturing Technology (China)
Jianguo He, Institute of Mechanical Manufacturing Technology (China)
Yongcheng Zheng, Institute of Mechanical Manufacturing Technology (China)
Qing Luo, Institute of Mechanical Manufacturing Technology (China)
Jing Hou, Fine Optical Engineering Research Ctr. (China)
Zhigang Yuan, Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 9281:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

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