Share Email Print
cover

Proceedings Paper

A novel measuring device for step gauge
Author(s): Shuanghua Sun; Xueping Shen; Lingding Zou; Hongtang Gao; Xiaoyou Ye
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Combining laser interferometric comparator with high precision inductance sensor, a novel measuring device for step gauge was developed. A high precision laser interferometer system was used for a length standard; a zero-crossing trigger signal of inductance sensor output voltage was used for the aiming signal. In order to improve the measuring accuracy, several high precision sensors were installed to measure environmental parameters for compensating the laser wavelength according to the Edlén empirical equation. A rotating mechanism was designed. Two key problems, probe obstacle avoidance and aiming repeatability, were solved. Experimental analysis of the contact force and speed of influence on measuring probe repeatability, and a segmented control method of the movement speed was established. The experiment indicates that the system has a high accuracy of measurement, which can be used for contact measurement of other one dimension length standard.

Paper Details

Date Published: 21 August 2014
PDF: 7 pages
Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 92830D (21 August 2014); doi: 10.1117/12.2069753
Show Author Affiliations
Shuanghua Sun, National Institute of Metrology (China)
Xueping Shen, National Institute of Metrology (China)
Lingding Zou, National Institute of Metrology (China)
Hongtang Gao, National Institute of Metrology (China)
Xiaoyou Ye, National Institute of Metrology (China)


Published in SPIE Proceedings Vol. 9283:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Tianchun Ye; A. G. Poleshchuk; Song Hu, Editor(s)

© SPIE. Terms of Use
Back to Top