Share Email Print
cover

Proceedings Paper

Research on the fluid jet polishing in advanced optical fabrication
Author(s): Tianxiang Sun; Long Sun; Yuqi Jin; Feng Wang; Dianxian Sun
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Based on the principle of fluid mechanics, this paper presents the technological process of Fluid Jet Polishing. According to the Preston hypothesis, the Fluid Jet Polishing removal amount could be described as a linearity function. The material is removed by the collision and shear action between slurry and work-piece. Comparing to other optical method, kind of abrasive slurry, average diameter of abrasive particle, pressure of abrasive particle, working time, incidence distance and angle of incidence influence the surface figure result and quality of fluid jet polishing. The paper mainly focuses on the influence of abrasive slurry and incidence distance. In the experiment, we take the diameter of Φ120mm, thickness of 20mm, fused silica for example to examine the exactitude principle of the fluid jet polishing. After the final process of fluid jet polishing, the surface figure PV(Peak and Valley) is about 0.046λ(λ=633nm), the RMS (Root-Mean-Square)is about 0.007λ. The result of experiment testifies fluid jet polishing could get high precision.

Paper Details

Date Published: 6 August 2014
PDF: 5 pages
Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92812Q (6 August 2014); doi: 10.1117/12.2069715
Show Author Affiliations
Tianxiang Sun, Dalian Institute of Chemical Physics (China)
Long Sun, Dalian Institute of Chemical Physics (China)
Yuqi Jin, Dalian Institute of Chemical Physics (China)
Feng Wang, Dalian Institute of Chemical Physics (China)
Dianxian Sun, Dalian Institute of Chemical Physics (China)


Published in SPIE Proceedings Vol. 9281:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

© SPIE. Terms of Use
Back to Top