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Proceedings Paper

Removal of surface figure deformation due to gravity in optical test
Author(s): Wei Gu; Fan Wu; Yong Liu; Xi Hou
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Paper Abstract

For optical surface measurement with higher accuracy, a simple method for removing surface figure deformation due to gravity was adopted and its principle research and error analysis were conducted. Based on optical flat supporting case, properties of gravitational deformation of the tested sample was analyzed by finite element method (FEM). In order to verify high accuracy of FEM analysis, a method which could remove the original surface deviation of the reference and the tested from the test results was adopted. According to the method, difference between theoretical and experimental results represented by Root-Mean-Square (RMS) value was only 0.404 nm. The result shown that the FEM analysis is accurate enough and the surface figure deformation due to gravity could be removed from test results efficiently. The method discussed here could benefit the high accuracy optical measurement.

Paper Details

Date Published: 18 September 2014
PDF: 7 pages
Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 928209 (18 September 2014); doi: 10.1117/12.2069597
Show Author Affiliations
Wei Gu, Institute of Optics and Electronics (China)
Univ. of Electronic Science and Technology of China (China)
Univ. of Chinese Academy of Sciences (China)
Fan Wu, Institute of Optics and Electronics (China)
Yong Liu, Univ. of Electronic Science and Technology of China (China)
Xi Hou, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 9282:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Wei Gao, Editor(s)

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