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Proceedings Paper

ArF and KrF excimer lasers with long lifetime: a status report
Author(s): George M. Chumak
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Paper Abstract

The results of experimental investigation of factors which restrict the gas lifetime in pulsed discharge and electron beam pumped ArF and KrF for micromachining, medicine, and short-pulse excimer lasers have been presented. The correlation in between gas mixture lifetime and constant rate of fluorine concentration decrease has been observed. It has been determined that the main canal of fluorine concentration decrease is the reaction of formation of metal fluorides of electrodes. Compositions of gas phase impurities of laser mixture which are formed during the laser operating and their influence on the characteristics of laser emission have been ascertained. An absence of appreciable influence of absorption and scattering of laser emission by impurities has been revealed. The mechanism of influence of solid-state impurities on lasing energy has been suggested.

Paper Details

Date Published: 17 April 1995
PDF: 12 pages
Proc. SPIE 2380, UV and Visible Lasers and Laser Crystal Growth, (17 April 1995); doi: 10.1117/12.206952
Show Author Affiliations
George M. Chumak, Russian Scientific Ctr. (Russia)


Published in SPIE Proceedings Vol. 2380:
UV and Visible Lasers and Laser Crystal Growth
Richard Scheps; Milan R. Kokta, Editor(s)

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