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Proceedings Paper

Study on the auto-leveling adjustment vibration isolation system for the ultra-precision machine tool
Author(s): XiCong Zou; ZengQiang Li; XueSen Zhao; Tao Sun; KunPeng Zhang
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Paper Abstract

The requirement of the vibration isolation system for ultra-precision machine tool was extremely stringent. However, most of the isolation systems currently cannot meet the requirement. Therefore, it is urgently needed to design a new vibration isolation system to fulfill the strict vibration capability required by ultra-precision machine tool. In this paper the structure and principle of the conventional vibration isolation systems composed of air springs were first elucidated thoroughly. Based on these knowledge, we have designed a vibration isolation system with the function of auto-leveling adjustment for a home-made ultra-precision machine tool. The capability of vibration isolation system was validated by an experimental method, in which acceleration-frequency curves were recorded. And post data processing including the analyzing the cut-off frequency and amplitude attenuation were followed. The experimental results demonstrated that the air spring vibration isolation system designed in this paper has the capability to effectively isolate the vibration from the ground: it has a higher attenuation ratio for vibration with a frequency beyond 3 Hz, which preferably meet the vibration isolation requirement of the ultra-precision machine tool.

Paper Details

Date Published: 6 August 2014
PDF: 7 pages
Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92812L (6 August 2014); doi: 10.1117/12.2069463
Show Author Affiliations
XiCong Zou, Harbin Institute of Technology (China)
ZengQiang Li, Harbin Institute of Technology (China)
XueSen Zhao, Harbin Institute of Technology (China)
Tao Sun, Harbin Institute of Technology (China)
KunPeng Zhang, Beijing U-Precision Tech Co., Ltd. (China)


Published in SPIE Proceedings Vol. 9281:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

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