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Proceedings Paper

Design of a vertical ultra-precision linear axis modular driven by dual linear motors
Author(s): Enbing Qi
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Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, ; doi: 10.1117/12.2069461
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Enbing Qi, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 9281:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

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