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Proceedings Paper

Design of a vertical ultra-precision linear axis modular driven by dual linear motors
Author(s): Enbing Qi; Zhenyong Fang; Tao Sun; Bo Wang
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Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, ; doi: 10.1117/12.2069456
Show Author Affiliations
Enbing Qi, Harbin Institute of Technology (China)
Zhenyong Fang, Harbin Institute of Technology (China)
Tao Sun, Harbin Institute of Technology (China)
Bo Wang, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 9281:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

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