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Proceedings Paper

High throughput data acquisition with a multi-beam SEM
Author(s): Anna Lena Keller; Dirk Zeidler; Thomas Kemen
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Paper Abstract

Conventional scanning electron microscopes are limited in their ultimate data acquisition rate at a given resolution by statistical electron-electron interaction (so-called Coulomb interaction) as well as band width of detectors and deflection systems. We increased imaging speed dramatically by using multiple electron beams in a single column and parallel detection of the secondary electrons. The multi-beam SEM generates multiple overlapping images during a single scan pass, thereby covering a larger area in shorter time as compared to a single-beam SEM at the same pixel size. This addresses the upcoming need for high speed imaging at electron microscopic resolution to investigate larger and larger areas and volumes.

Paper Details

Date Published: 16 September 2014
PDF: 6 pages
Proc. SPIE 9236, Scanning Microscopies 2014, 92360B (16 September 2014); doi: 10.1117/12.2069119
Show Author Affiliations
Anna Lena Keller, Carl Zeiss Microscopy GmbH (Germany)
Dirk Zeidler, Carl Zeiss Microscopy GmbH (Germany)
Thomas Kemen, Carl Zeiss Microscopy GmbH (Germany)

Published in SPIE Proceedings Vol. 9236:
Scanning Microscopies 2014
Michael T. Postek; Dale E. Newbury; S. Frank Platek; Tim K. Maugel, Editor(s)

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