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Proceedings Paper

Fabrication of resonant subwavelength grating based on thiol-ene
Author(s): Man Zhang; Qiling Deng; Lifang Shi; Zhiwei Li; Hui Pang; Yukun Zhang; Jinqing Yu; Song Hu
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Paper Abstract

This paper presents an approach used to fabricate resonant subwavelength grating based on thiol-ene material. First of all, polydimethylsiloxane soft imprint stamp with opposite structure of the subwavelength grating master mold is made by casting. Then, the desired subwavelength grating with UV-curable thiol-ene material grating structure is fabricated using the polydimethylsioxane soft stamp by UV-curable soft-lithography. Here, we fabricate a subwavelength grating with period of 300nm using the approach, which could reflect blue light with wavelength ranging from 448nm to 482nm at a specific angle and presents the excellent resonant characteristic. The experimental results are consistent with the simulation results, demonstrating that the approach proposed in this paper could effectively fabricate the thiol-ene material resonant subwavelength grating structure. The thiol-ene material is a new green UV-curable polymer material, including a number of advantages such as rapid UV-curing in the natural environment, low-cost, high resolution, and regulative performance characteristic. The fabrication technique in this paper is simple, low-cost, and easy to high throughput, which has broad application prospects in the preparation of micro and nano structures.

Paper Details

Date Published: 21 August 2014
PDF: 6 pages
Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 92830R (21 August 2014); doi: 10.1117/12.2068526
Show Author Affiliations
Man Zhang, Institute of Optics and Electronics (China)
Qiling Deng, Institute of Optics and Electronics (China)
Lifang Shi, Institute of Optics and Electronics (China)
Zhiwei Li, Institute of Optics and Electronics (China)
Hui Pang, Institute of Optics and Electronics (China)
Yukun Zhang, Institute of Optics and Electronics (China)
Jinqing Yu, Institute of Optics and Electronics (China)
Song Hu, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 9283:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Tianchun Ye; A. G. Poleshchuk; Song Hu, Editor(s)

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