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Proceedings Paper

Silicon micromachined (2x2) opto coupler
Author(s): Leif Smith; Lars Tenerz; Bertil Hok
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Paper Abstract

Micromachining in silicon is a well established technique for manufacturing sensors and actuators. Another field is fiber alignment components such as V-grooves and reflecting mirrors. This work is aimed towards a batch fabricated opto coupler with the use of both V-grooves and perpendicular inflecting mirrors on the same silicon wafer, with a maximum utilization of the single crystalline lattice structure. Since both the (1 1 1) and (100)-etchstop planes are given by the crystal lattice structure, it is possible to obtain a well defmed 45 degree angle between the [1 10] and [100]-directions. The main function of the (2x2) coupler is that a perpendicular wall has a height that covers half the fiber core. The result is that half of the incoming light beam passes over the wall and the other half is reflected. There will obviously be some geometrical limitations for the distance between the fibers, which introduces optical loss that must be considered. The measured excess loss is 4dB above the theoretical limit.

Paper Details

Date Published: 1 August 1990
PDF: 5 pages
Proc. SPIE 1281, Optical Interconnections and Networks, (1 August 1990); doi: 10.1117/12.20682
Show Author Affiliations
Leif Smith, Univ. of Uppsala (Sweden)
Lars Tenerz, Univ. of Uppsala (Sweden)
Bertil Hok, Univ. of Uppsala (Sweden)

Published in SPIE Proceedings Vol. 1281:
Optical Interconnections and Networks
Hartmut Bartelt, Editor(s)

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