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Proceedings Paper

Investigation of binary coating material mixtures using grazing incidence EUV-reflectometry
Author(s): I. Balasa; X. Neiers; M. Mende; L. Jensen; D. Ristau
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Paper Abstract

Having been of special interest in thin film technology for a long time already, mixtures of coating materials are still in the focus of research aiming for highest performance in high power as well as in ultra-short pulse laser applications. On the one hand, coating material combinations allow customizing the coating for a certain application by modifying advantageously the refractive index or the band gap energy. On the other hand, that technology is essential in the production of Rugate-filters, using gradually varied refractive index profiles. Therefore, it is of special interest to get insight into the composition of such mixed layers, not only in terms of refractive index and absorption coefficient, but also to evaluate the fractions of materials involved for gaining a better understanding, and therefore to reach highest possible reproducibility for production of such kind of thin films. In this work, single layers of binary mixtures of aluminum oxide, aluminum fluoride, and silicon dioxide are studied with respect to their composition using extreme ultraviolet reflectometry (EUV-R). As the penetration depth of EUV radiation is only a few tens of nanometers under grazing incidence, this non-invasive measurement technique is sensitive to the near surface composition of the film. Therefore it allows investigating the layer material independently of the substrate on which it was deposited. Using specific absorption edges of the involved materials in the EUV spectrum, an empirical correlation between EUV response and mixture ratio is developed and compared to the deep ultraviolet (VUV) absorption edges of the mixture materials.

Paper Details

Date Published: 31 October 2014
PDF: 7 pages
Proc. SPIE 9237, Laser-Induced Damage in Optical Materials: 2014, 92371Y (31 October 2014); doi: 10.1117/12.2068197
Show Author Affiliations
I. Balasa, Laser Zentrum Hannover e.V. (Germany)
X. Neiers, Lab. de Chimie Physique, Univ. de Paris-Sud (France)
M. Mende, LASEROPTIK GmbH (Germany)
L. Jensen, Laser Zentrum Hannover e.V. (Germany)
D. Ristau, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 9237:
Laser-Induced Damage in Optical Materials: 2014
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; MJ Soileau; Detlev Ristau, Editor(s)

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