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Proceedings Paper

High accurate subaperture testing
Author(s): Fengtao Yan; Bin Fan; Xi Hou; Fan Wu; Baiping Lei
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Paper Abstract

We introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are ~0.80nm and ~0.87nm.

Paper Details

Date Published: 18 September 2014
PDF: 6 pages
Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92822H (18 September 2014); doi: 10.1117/12.2068161
Show Author Affiliations
Fengtao Yan, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Bin Fan, Institute of Optics and Electronics (China)
Xi Hou, Institute of Optics and Electronics (China)
Fan Wu, Institute of Optics and Electronics (China)
Baiping Lei, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 9282:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Wei Gao, Editor(s)

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