Share Email Print
cover

Proceedings Paper

Absolute flatness testing of large synchrotron optics
Author(s): Weihao Lin; Yumei He; Li Song; Hongxin Luo; Jie Wang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Interferometry is one of the most efficient techniques in surface figure testing while the transmission surface usually limits the accuracy. Besides, standard figure interferometers often have a typical aperture of about 150 mm diameter which can not satisfy the need of large optics calibration. A novel method for characterizing the absolute surface figure of long grazing-incidence optics used in synchrotron radiation beamlines is presented. We demonstrate oblique incidence interferometry to overcome the aperture limitation. Furthermore, multiple rotating measurements are used to remove the transmission surface errors. The new solution is simple and easy without dismantling the transmission flat throughout the calibration procedure. The theoretical derivation, experiment results and uncertainty analysis are presented.

Paper Details

Date Published: 18 September 2014
PDF: 6 pages
Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92820R (18 September 2014); doi: 10.1117/12.2068000
Show Author Affiliations
Weihao Lin, Shanghai Institute of Applied Physics (China)
Univ. of Chinese Academy of Sciences (China)
Yumei He, Shanghai Institute of Applied Physics (China)
Li Song, Shanghai Institute of Applied Physics (China)
Hongxin Luo, Shanghai Institute of Applied Physics (China)
Jie Wang, Shanghai Institute of Applied Physics (China)


Published in SPIE Proceedings Vol. 9282:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Wei Gao, Editor(s)

© SPIE. Terms of Use
Back to Top