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Proceedings Paper

The research on conformal acid etching process of glass ceramic
Author(s): Kepeng Wang; Peiji Guo
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Paper Abstract

A series of experiments have been done to explore the effect of different conditions on the hydrofluoric acid etching. The hydrofluoric acid was used to etch the glass ceramic called “ZERODUR”, which is invented by SCHOTT in Germany. The glass ceramic was processed into cylindrical samples. The hydrofluoric acid etching was done in a plastic beaker. The concentration of hydrofluoric acid and the etching time were changed to measure the changes of geometric tolerance and I observed the surface using a microscope in order to find an appropriate condition of hydrofluoric acid etching.

Paper Details

Date Published: 6 August 2014
PDF: 9 pages
Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92812I (6 August 2014); doi: 10.1117/12.2067877
Show Author Affiliations
Kepeng Wang, Soochow Univ. (China)
Peiji Guo, Soochow Univ. (China)


Published in SPIE Proceedings Vol. 9281:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

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