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Proceedings Paper

Conducting OPC retargeting as guided by principles of classical dynamics
Author(s): Jingyu Wang; Piyush Verma; Alexander Wei; William Wilkinson
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Paper Abstract

We treat the OPC engine with a classical dynamics perspective, and quantify its potential to converge in all dimensions. The inherent engine weakness is thus taken into account for retargeting planning. Specifically, we follow the one-dimensional helical spring model, and calculate the retarget amount as an analogy to the spring restoring force, and eventually improve the wafer target convergence. Unlike conventional measures, this methodology does not require patching or rebuilding the OPC engine, therefore minimizes the cycle time. Meanwhile, it entails little risk by causing no impact on the mask solution outside the retargeted region, thereby compartmentalizing the treatment.

Paper Details

Date Published: 8 October 2014
PDF: 10 pages
Proc. SPIE 9235, Photomask Technology 2014, 923507 (8 October 2014); doi: 10.1117/12.2067814
Show Author Affiliations
Jingyu Wang, GLOBALFOUNDRIES Inc. (United States)
Piyush Verma, GLOBALFOUNDRIES Inc. (United States)
Alexander Wei, Mentor Graphics Corp. (United States)
William Wilkinson, GLOBALFOUNDRIES Inc. (United States)

Published in SPIE Proceedings Vol. 9235:
Photomask Technology 2014
Paul W. Ackmann; Naoya Hayashi, Editor(s)

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