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Proceedings Paper

High-frequency angular vibration calibration using the mirror assembly diffraction grating heterodyne laser interferometer
Author(s): Jingfeng Xue; Dazhi Zhang; Xinliang Li; Weiqian Zhao
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Paper Abstract

In order to improve the dynamic evaluating capabilities of the inertial devices and realize the traceability in angular vibration, the angular vibration calibration devices are developed and it is very important to measure the angular vibration accurately for calibration devices. In this paper, a new diffraction grating heterodyne laser interferometer method was introduced for high-frequency and micro-amplitude angular-vibration measurement, which uses a differential and symmetrical optical-path arrangement. The proposed method has the advantages of high-precision, high anti-interference and convenient debugging, and could achieve the angular measurement resolution within 0.02″.

Paper Details

Date Published: 18 September 2014
PDF: 6 pages
Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 928219 (18 September 2014); doi: 10.1117/12.2067780
Show Author Affiliations
Jingfeng Xue, Beijing Institute of Technology (China)
Key Lab. of Science and Technology for National Metrology and Calibration (China)
Dazhi Zhang, Key Lab. of Science and Technology for National Metrology and Calibration (China)
Xinliang Li, Key Lab. of Science and Technology for National Metrology and Calibration (China)
Weiqian Zhao, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 9282:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Wei Gao, Editor(s)

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