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Proceedings Paper

Influences of grinding and polishing parameters on the quality of super smooth surface
Author(s): Yuzhu Jin; Yi Tong; Lingyan Jiao; Dongxu Wu; Weijin Guo
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Paper Abstract

Firstly, in this paper, a reasonable process flow is designed and the surface roughness of each procedure is tested. Secondly, the influences of particle size distribution of slurry on the quality of super smooth surface are studied, and then the conclusions are obtained that large span distribution of slurry will lead to surface scratches. Lastly, the effects of aging and ratios of polishing pad on the quality of super smooth surface are researched, and then some specific process parameters are gained such as shaving cycle and asphalt ratios in different environments.

Paper Details

Date Published: 6 August 2014
PDF: 6 pages
Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92810R (6 August 2014); doi: 10.1117/12.2067769
Show Author Affiliations
Yuzhu Jin, Tianjin Jinhang Institute of Technical Physics (China)
Tianjin Key Lab. of Optical Thin Film (China)
Yi Tong, Tianjin Jinhang Institute of Technical Physics (China)
Tianjin Key Lab. of Optical Thin Film (China)
Lingyan Jiao, Tianjin Jinhang Institute of Technical Physics (China)
Tianjin Key Lab. of Optical Thin Film (China)
Dongxu Wu, Tianjin Jinhang Institute of Technical Physics (China)
Tianjin Key Lab. of Optical Thin Film (China)
Weijin Guo, Tianjin Jinhang Institute of Technical Physics (China)
Tianjin Key Lab. of Optical Thin Film (China)


Published in SPIE Proceedings Vol. 9281:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

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