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Proceedings Paper

Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet
Author(s): Chunjin Wang; Xu Yang; Bo Zhong; Zhenzhong Wang; Yinbiao Guo; Qiao Xu
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Paper Abstract

The purpose of this paper is to study the effect of the inner pressure to the tool influence function (TIF) for polishing using a semi-rigid (SR) bonnet tool. The simulation model of a Semi-rigid (SR) bonnet polishing tool polishing BK7 is demonstrated and the pressure distribution data under different inflated-pressures in the contact area has been extracted. It’s observed that the inflated-pressure has few effects to the polishing pressure, and their shapes are also Gaussian-like. Hence, we made a hypothesis that the effect of inflated-pressure to the TIF is rather small. To verify this hypothesis, a group of experiments to generate TIFs under different inflated-pressure are conducted, and the hypothesis has been proved to be correct through comparing these TIFs.

Paper Details

Date Published: 20 August 2014
PDF: 6 pages
Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92810U (20 August 2014); doi: 10.1117/12.2067758
Show Author Affiliations
Chunjin Wang, Xiamen Univ. (China)
Institute of Mechanical Manufacturing Technology (China)
Xu Yang, Xiamen Univ. (China)
Bo Zhong, Fine Optical Engineering Research Ctr. (China)
Zhenzhong Wang, Xiamen Univ. (China)
Yinbiao Guo, Xiamen Univ. (China)
Qiao Xu, Research Ctr. of Laser Fusion (China)


Published in SPIE Proceedings Vol. 9281:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

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