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Proceedings Paper

Laser damage properties of films with different surface accuracy of substrates
Author(s): Jinman Ge; Junhong Su
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Paper Abstract

The analysis of laser damage properties of films is the focus of most concern in recent years. Many properties of the film have been studied, but the surface accuracy of the substrates shouldn’t be ignored. TiO2 films are prepared on K9 glass substrates with different surface accuracy by ion beam assistant deposition technique. The films’ surface morphology, microstructure and thickness are been analyzed. It shows that the substrates with different surface accuracy have some impact on thin film growth and make different micro-structures of thin film. According to the international standard requirements of the damage threshold, the films’ damage threshold is measured on the films’ laser-induced damage threshold test platform composed with 1064 nm Nd: YAG laser. The results indicate that the laser damage threshold of the film deposited on the substrate with the better surface accuracy is higher, and the substrate with high accuracy can improve the laser damage resistance of the film.

Paper Details

Date Published: 18 September 2014
PDF: 7 pages
Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92821K (18 September 2014); doi: 10.1117/12.2067739
Show Author Affiliations
Jinman Ge, Nanjing Univ. of Science and Technology (China)
Junhong Su, Nanjing Univ. of Science and Technology (China)
Xi'an Technological Univ. (China)


Published in SPIE Proceedings Vol. 9282:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Wei Gao, Editor(s)

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