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Proceedings Paper

Simple and precise measurement of the complex refractive index and thickness for thin films
Author(s): Yu Peng; Wei Li
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Paper Abstract

We demonstrate applications of a novel scheme which is used for measuring refractive index and thickness of thin film by analyzing the relative phase difference and reflected ratio at reflection point of a monolithic folded Fabry-Perot cavity (MFC). The complex refractive index and the thickness are calculated according to the Fresnel formula. Results show that the proposed method has an improvement in accuracy with simple and clear operating process compared with the conventional Ellipsometry.

Paper Details

Date Published: 21 August 2014
PDF: 5 pages
Proc. SPIE 9233, International Symposium on Photonics and Optoelectronics 2014, 923310 (21 August 2014); doi: 10.1117/12.2067095
Show Author Affiliations
Yu Peng, Beijing Institute of Technology (China)
Wei Li, China South Industries Institute (China)

Published in SPIE Proceedings Vol. 9233:
International Symposium on Photonics and Optoelectronics 2014
Zhiping Zhou, Editor(s)

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