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Proceedings Paper

Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments
Author(s): Allyn Jackson
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Paper Abstract

There are significant advantages of using the ReticleSenseTM Airborne Particle Sensor (APSR) in reticle environments to locate and troubleshoot airborne particles in reticle environments as compared to traditional surface scan reticle, in-situ or hand-held methods. Time, resource and cost savings are identified.

Paper Details

Date Published: 16 September 2014
PDF: 7 pages
Proc. SPIE 9235, Photomask Technology 2014, 92350E (16 September 2014); doi: 10.1117/12.2066378
Show Author Affiliations
Allyn Jackson, CyberOptics Corp. (United States)


Published in SPIE Proceedings Vol. 9235:
Photomask Technology 2014
Paul W. Ackmann; Naoya Hayashi, Editor(s)

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