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Proceedings Paper

Shear force microscopy using piezoresistive cantilevers in surface metrology
Author(s): Teodor Gotszalk; Daniel Kopiec; Andrzej Sierakowski; Paweł Janus; Piotr Grabiec; Ivo W. Rangelow
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Paper Abstract

In this article we describe application of piezoresistive cantilevers in surface investigations carried out with the use of shear force microscopy (ShFM). The novel piezoresistive cantilevers integrate a Wheatstone piezoresistive bridge was used to detect the cantilever deflection, thermal deflection detector and planar tip protruding out of the spring beam. Because the planar tip deflection can be detected and controlled electronically the described technology is very flexible and can be applied in many surface investigations. In this article we will present operation theory of the described solution, experimental setup, methods for calibration of the tip deflection detection and actuation The analysis will be illustrated with example results of topography measurements performed using the described technology.

Paper Details

Date Published: 16 September 2014
PDF: 8 pages
Proc. SPIE 9236, Scanning Microscopies 2014, 92360A (16 September 2014); doi: 10.1117/12.2066247
Show Author Affiliations
Teodor Gotszalk, Wroclaw Univ. of Technology (Poland)
Daniel Kopiec, Wroclaw Univ. of Technology (Poland)
Andrzej Sierakowski, Institute of Electron Technology (Poland)
Paweł Janus, Institute of Electron Technology (Poland)
Piotr Grabiec, Institute of Electron Technology (Poland)
Ivo W. Rangelow, Technische Univ. Ilmenau (Germany)

Published in SPIE Proceedings Vol. 9236:
Scanning Microscopies 2014
Michael T. Postek; Dale E. Newbury; S. Frank Platek; Tim K. Maugel, Editor(s)

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