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Proceedings Paper

Replicating micro-optical structures using soft embossing technique
Author(s): Xiaobing Shang; Jin-Yi Tan; Jelle De Smet; Pankaj Joshi; Esma Islamaj; Dieter Cuypers; Michael Vervaeke; Jürgen Van Erps; Hugo Thienpont; Herbert De Smet
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Paper Abstract

In this article we report the fabrication of large arrays of micro-optical gratings using soft embossing with elastic Polydimethylsiloxane (PDMS) molds and ultra-violet (UV) curable resins. Three different kinds of resins are used to replicate the master gratings in a process akin to a roll to roll process. The optical surface profiling measurements show that the dimensions of the replicated gratings closely approximate those of the master gratings. Optical diffractions of these gratings are also measured and analyzed.

Paper Details

Date Published: 17 October 2014
PDF: 7 pages
Proc. SPIE 9231, 30th European Mask and Lithography Conference, 92310H (17 October 2014); doi: 10.1117/12.2065912
Show Author Affiliations
Xiaobing Shang, Univ. Gent (Belgium)
Jin-Yi Tan, Univ. Gent (Belgium)
Jelle De Smet, Univ. Gent (Belgium)
Pankaj Joshi, Univ. Gent (Belgium)
Esma Islamaj, Univ. Gent (Belgium)
Dieter Cuypers, Univ. Gent (Belgium)
IMEC (Belgium)
Michael Vervaeke, Vrije Univ. Brussel (Belgium)
Jürgen Van Erps, Vrije Univ. Brussel (Belgium)
Hugo Thienpont, Vrije Univ. Brussel (Belgium)
Herbert De Smet, Univ. Gent (Belgium)


Published in SPIE Proceedings Vol. 9231:
30th European Mask and Lithography Conference
Uwe F. W. Behringer, Editor(s)

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