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Proceedings Paper

Comparison of optical methods to measure the thickness of nanometer scale dielectric films
Author(s): Hugo Gonçalves; César Bernardo; Michael Scott Belsley; Peter Schellenberg
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Date Published:
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Proc. SPIE 9286, Second International Conference on Applications of Optics and Photonics, 92864Y; doi: 10.1117/12.2063944
Show Author Affiliations
Hugo Gonçalves, Univ. do Minho (Portugal)
César Bernardo, Univ. do Minho (Portugal)
Michael Scott Belsley, Univ. do Minho (Portugal)
Peter Schellenberg, Univ do Minho (Portugal)


Published in SPIE Proceedings Vol. 9286:
Second International Conference on Applications of Optics and Photonics
Manuel Filipe P. C. Martins Costa; Rogério Nunes Nogueira, Editor(s)

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