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Proceedings Paper

Multilayer soft x-ray optics
Author(s): Charles M. Falco
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Paper Abstract

Molecular Beam Epitaxy (MBE) is able to produce high purity, epitaxial multilayer films with well defined interfaces. This precise deposition control along with a number of in situ characterization instruments allows a high degree of control over the formation of multilayers. We have three MBE systems, each with characteristics suitable for a subset of possible materials, that we have used to produce a large variety of x-ray multilayers. Together these MBE systems contain Reflection High Energy Electron Diffraction (RHEED), Low Energy Electron Diffraction (LEED), Auger Electron Spectroscopy (AES), X-Ray Photoelectron Spectroscopy (XPS), Ion Scattering Spectroscopy (ISS), Secondary Ion Mass Spectroscopy (SIMS), and Scanning Tunneling Microscopy (STM). Here I provide an overview of the techniques the students, postdocs, visiting scientists, and collaborators have used to select the materials pairs we have grown and analyzed for our x-ray multilayers.

Paper Details

Date Published: 20 October 2014
PDF: 4 pages
Proc. SPIE 9186, Fifty Years of Optical Sciences at The University of Arizona, 91860M (20 October 2014); doi: 10.1117/12.2063904
Show Author Affiliations
Charles M. Falco, College of Optical Sciences, The Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 9186:
Fifty Years of Optical Sciences at The University of Arizona
Harrison H. Barrett; John E. Greivenkamp; Eustace L. Dereniak, Editor(s)

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