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Proceedings Paper

Integration of diffractive lenses with addressable vertical-cavity laser arrays
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Paper Abstract

An optical interconnection system is being developed to provide vertical, digital data channels for stacked multichip modules. A key component of the system is an array of individually addressable vertical-cavity surface-emitting lasers with diffractive lenses integrated into the substrate to control beam divergence and direction. The lenses were fabricated by direct-write e-beam lithography and reactive ion beam etching into the GaAs substrate. Preliminary device performance data and the design and fabrication issues are discussed.

Paper Details

Date Published: 10 April 1995
PDF: 9 pages
Proc. SPIE 2398, Circular-Grating Light-Emitting Sources, (10 April 1995); doi: 10.1117/12.206343
Show Author Affiliations
Mial E. Warren, Sandia National Labs. (United States)
Tu Du, Sandia National Labs. (United States)
Joel R. Wendt, Sandia National Labs. (United States)
G. Allen Vawter, Sandia National Labs. (United States)
Richard Franklin Carson, Sandia National Labs. (United States)
Kevin L. Lear, Sandia National Labs. (United States)
Sean P. Kilcoyne, Sandia National Labs. (United States)
Richard P. Schneider, Sandia National Labs. (United States)
John C. Zolper, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 2398:
Circular-Grating Light-Emitting Sources
S. Iraj Najafi; Mahmoud Fallahi; Nasser Peyghambarian, Editor(s)

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