Share Email Print
cover

Proceedings Paper

Complete shape measurement of micro parts by digital holography
Author(s): S. Huferath-von Luepke; R. Klattenhoff; C. Dankwart; C. Falldorf; R. B. Bergmann
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Industry frequently demands fast and robust measurement techniques for the inline inspection of the full shape of objects in the micro range. We present a method for complete 360 degree measurement of the shape of a micro cup using digital holographic microscopy and show first results of sequential 360 degree measurement using different illumination and observation directions.

Paper Details

Date Published: 18 August 2014
PDF: 8 pages
Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 920302 (18 August 2014); doi: 10.1117/12.2063389
Show Author Affiliations
S. Huferath-von Luepke, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
R. Klattenhoff, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
C. Dankwart, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
C. Falldorf, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
R. B. Bergmann, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Univ. Bremen (Germany)


Published in SPIE Proceedings Vol. 9203:
Interferometry XVII: Techniques and Analysis
Katherine Creath; Jan Burke; Joanna Schmit, Editor(s)

© SPIE. Terms of Use
Back to Top