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Proceedings Paper

Laser sources and laser-induced processing of micro 3D structures
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Paper Abstract

The tailoring of chemical, morphologic, optical and mechanical properties of solid surfaces with laser radiation is described according to the understanding and control of photon-matter interaction with the melt, vapor and plasma states involved. According to the processing variables the dynamics of material removal, material deposition and light attenuation can be matched to the requirements of tailoring the 3D properties of material surfaces with laser radiation. The modification of surfaces by chemical processing technique, the removal of matter by thermal and non-thermal processes including etching and ablation, the deposition of single and multilayer thin films, the photoresistless pattering by direct and indirect processing techniques, and the machinig by surface treatment and drilling as well are examplarily reported. Keywords: laser processing, micro 3D structures

Paper Details

Date Published: 10 April 1995
PDF: 13 pages
Proc. SPIE 2403, Laser-Induced Thin Film Processing, (10 April 1995); doi: 10.1117/12.206281
Show Author Affiliations
Ernst-Wolfgang Kreutz, RWTH Aachen (Germany)


Published in SPIE Proceedings Vol. 2403:
Laser-Induced Thin Film Processing
Jan J. Dubowski, Editor(s)

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