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Proceedings Paper

Technique for AFM tip characterization
Author(s): Ndubuisi G. Orji; Hiroshi Itoh; Chunmei Wang; Ronald G. Dixson
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Paper Abstract

In atomic force microscopy (AFM) metrology, the scanning tip is a major source of uncertainty. Images taken with an AFM show an apparent broadening of feature dimensions due to the finite size of the tip. An AFM image is a combination of the feature shape, the tip geometry and details of the tip-sample interaction. Here we describe the use of a new multi-feature characterizer for CD-AFM tip, and report initial measurement results. The results are compared with those obtained from the current tip characterizer.

Paper Details

Date Published: 8 September 2014
PDF: 6 pages
Proc. SPIE 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII, 917305 (8 September 2014); doi: 10.1117/12.2062759
Show Author Affiliations
Ndubuisi G. Orji, National Institute of Standards and Technology (United States)
Hiroshi Itoh, National Institute of Advanced Industrial Science and Technology (Japan)
Chunmei Wang, National Institute of Advanced Industrial Science and Technology (Japan)
Ronald G. Dixson, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 9173:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
Michael T. Postek, Editor(s)

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