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Proceedings Paper

The high-resolution reciprocal-space mapping of the Si-Ge nano-heterostructure by refractive x-ray optics
Author(s): Petr Ershov; Sergey Kuznetsov; Irina Snigireva; Peter Zaumseil; Yunkin Vyacheslav; Alexander Goikhman; Anatoly Snigirev
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Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 920705; doi: 10.1117/12.2062698
Show Author Affiliations
Petr Ershov, Immanuel Kant Baltic Federal Univ. (Russian Federation)
Sergey Kuznetsov, Institute of Microelectronics Technology and High Purity Materials (Russian Federation)
Irina Snigireva, ESRF - The European Synchrotron (France)
Immanuel Kant Baltic Federal Univ. (Russian Federation)
Peter Zaumseil, IHP (Germany)
Yunkin Vyacheslav, IMT RAS (Russian Federation)
Alexander Goikhman, Immanuel Kant Baltic Federal Univ. (Russian Federation)
Anatoly Snigirev, ESRF - The European Synchrotron (France)
Immanuel Kant Baltic Federal Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 9207:
Advances in X-Ray/EUV Optics and Components IX
Christian Morawe; Ali M. Khounsary; Shunji Goto, Editor(s)

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