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Proceedings Paper

Optical, electrical and structural study of metallic nano-structured thin films fabricated by oblique angle deposition
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Paper Abstract

Various metallic nano-structured thin films were fabricated by oblique angle deposition. Their optical, electrical and structural properties were investigated to explore potential applications in optoelectronic field. The shape, size and density of metal films were discussed based on SEM images and their thermal characteristics. The optical reflectance, transmittance, and absorptance measurements showed unique optical properties of each metallic nano-structured films. Indeed, ellipsometry measurement and resistance measurement were performed to investigate directivity of nanocolumnar films depending on polarization properties, and conductivity, respectively.

Paper Details

Date Published: 27 August 2014
PDF: 8 pages
Proc. SPIE 9172, Nanostructured Thin Films VII, 91720T (27 August 2014); doi: 10.1117/12.2062301
Show Author Affiliations
Sung Jun Jang, Northwestern Univ. (United States)
Alireza Bonakdar, Northwestern Univ. (United States)
Hooman Mohseni, Northwestern Univ. (United States)


Published in SPIE Proceedings Vol. 9172:
Nanostructured Thin Films VII
Akhlesh Lakhtakia; Tom G. Mackay; Motofumi Suzuki, Editor(s)

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