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Proceedings Paper

Synthesis of ultrafine ceramic powders by means of CO2 laser in a flow reactor
Author(s): Roberta Fantoni; E. Borsella; S. Piccirillo; S. Enzo
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Paper Abstract

High purity, ultrafine Si, SiC and Si N4 powders have been produced from gas phase reactants (SiH, hydrocarbons, NH3) in a C2 laser induced process. Optical on-line diagnostics have been performed to investigate the reaction mechanism in the gas phase. Final product chemical analysis has been employed to check the formation of stoichiometric compounds. Morphologic and crystallographic characterizations of the powders have been performed in order to establish their phase composition, their micro-structure and to understand the growth mechanism which is mostly affected by laser power and residence time.

Paper Details

Date Published: 1 August 1990
PDF: 12 pages
Proc. SPIE 1279, Laser-Assisted Processing II, (1 August 1990); doi: 10.1117/12.20623
Show Author Affiliations
Roberta Fantoni, ENEA (Italy)
E. Borsella, ENEA (Italy)
S. Piccirillo, ENEA (Italy)
S. Enzo, Univ. Venezia (Italy)

Published in SPIE Proceedings Vol. 1279:
Laser-Assisted Processing II
Lucien Diego Laude, Editor(s)

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