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Proceedings Paper

Three-dimensional (3D) displacement measurement by a holographic interferometric microscope
Author(s): Oliver Kruschke; Guenther K.G. Wernicke; Hartmut Gruber
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Paper Abstract

A holographic interferometric microscope is presented, which combines conjugate reconstruction and two-reference beam method to apply the static evaluation method with 3 illumination directions. In this way the determination of every component of small displacements over objects which are smaller than a millimeter is possible. A solder bond and a surface mounted resistor were used to test the performance of the proposed hologram- microscopic arrangement. The thermal deformations under operation conditions were investigated. The orthogonal displacement components were calculated from the experimental results and compared with the expected deformation behavior.

Paper Details

Date Published: 12 April 1995
PDF: 7 pages
Proc. SPIE 2406, Practical Holography IX, (12 April 1995); doi: 10.1117/12.206228
Show Author Affiliations
Oliver Kruschke, Humboldt Univ. zu Berlin (Germany)
Guenther K.G. Wernicke, Humboldt Univ. zu Berlin (Germany)
Hartmut Gruber, Humboldt Univ. zu Berlin (Germany)


Published in SPIE Proceedings Vol. 2406:
Practical Holography IX
Stephen A. Benton, Editor(s)

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