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Proceedings Paper

Design of a precision two-dimensional tip-tilting stage system for autocollimator-based long trace profiler angular calibration
Author(s): D. Shu; J. Qian; W. Liu; S. Kearney; J. Anton; J. Sullivan; L. Assoufid
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Paper Abstract

Autocollimator-based long trace profiler requires precise angular calibration to perform accurate measurements for xray mirrors. A prototype of a precision two-dimensional tip-tilting stage system has been designed and tested for a new autocollimator-based long trace profiler at the Advanced Photon Source (APS), Argonne National Laboratory (ANL). This flexural stage system is designed to meet challenging mechanical and optical specifications for producing high positioning resolution and stability for angular calibration for autocollimator-based long trace profiler. It could also be used as a precision mirror manipulator for hard x-ray nano-focusing with Montel mirror optics. The mechanical design of a precision two-dimensional tip-tilting stage system as well as preliminary test results of its precision positioning performance are presented in this paper.

Paper Details

Date Published: 5 September 2014
PDF: 8 pages
Proc. SPIE 9206, Advances in Metrology for X-Ray and EUV Optics V, 92060H (5 September 2014); doi: 10.1117/12.2062216
Show Author Affiliations
D. Shu, Argonne National Lab. (United States)
J. Qian, Argonne National Lab. (United States)
W. Liu, Argonne National Lab. (United States)
S. Kearney, Argonne National Lab. (United States)
Univ. of Illinois at Chicago (United States)
J. Anton, Argonne National Lab. (United States)
Univ. of Illinois at Chicago (United States)
J. Sullivan, Argonne National Lab. (United States)
L. Assoufid, Argonne National Lab. (United States)


Published in SPIE Proceedings Vol. 9206:
Advances in Metrology for X-Ray and EUV Optics V
Lahsen Assoufid; Haruhiko Ohashi; Anand Krishna Asundi, Editor(s)

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