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Proceedings Paper

Simple analytic model including shielding by the plume during excimer laser ablation of polyimide
Author(s): Klaus Schildbach
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Paper Details

Date Published: 1 August 1990
PDF: 6 pages
Proc. SPIE 1279, Laser-Assisted Processing II, (1 August 1990); doi: 10.1117/12.20621
Show Author Affiliations
Klaus Schildbach, Nederlandse Philips Bedrijven BV (Netherlands)

Published in SPIE Proceedings Vol. 1279:
Laser-Assisted Processing II
Lucien Diego Laude, Editor(s)

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