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Proceedings Paper

Simple analytic model including shielding by the plume during excimer laser ablation of polyimide
Author(s): Klaus Schildbach
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Paper Abstract

For a quantitative description of the ablation of polyimide by excimer laser pulses in the nanosecond range, the concept of a moving surface during the pulse and of the shielding of its trailing edge by the plume is very essential. In a recent publication by Mahan et al.(1989) the concept of a moving interface was solved analytically. The main purpose of this paper is to include here the shielding effect. It will be shown that the resulting analytical formula describes most experimental data with surprising accuracy.

Paper Details

Date Published: 1 August 1990
PDF: 6 pages
Proc. SPIE 1279, Laser-Assisted Processing II, (1 August 1990); doi: 10.1117/12.20621
Show Author Affiliations
Klaus Schildbach, Nederlandse Philips Bedrijven BV (Netherlands)

Published in SPIE Proceedings Vol. 1279:
Laser-Assisted Processing II
Lucien Diego Laude, Editor(s)

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